Specialty MFCS

DIGITAL / SPECIALTY MFCS

Models

  • MicroTrak 101 Ultra Low Flow
  • SmartTrak 140 Ultra Low Delta P
  • SmartTrak 100-HP Ultra High Pressure
  • MaxTrak 180 Industrial NEMA 6 (IP67)

Description

  • Digital MFC’s engineered for challenging applications
  • Ultra-low flow rates down to 0.1 sccm (smlm)
  • Ultra-low pressure drop ΔP of 5 psid (310 mBard)
  • Industrial approval ratings of NEMA 6 & IP67 ratings
  • High pressure up to 5000 psig (345 barg)
  • Many other versions available, consult factory
  • Leak integrity 5 x 10-9 smL/sec of helium
  • Free user software
  • CE Approved

Fluids Measured

  • All clean gases including toxics and corrosives

Accuracy

  • +/- 1.0% of full scale

Repeatability

  • +/- 0.2% of full scale

Flow Range

(Turndown – Meters 100:1 / Controllers 50:1)

  • Mass flow rates up to 1000 slpm (nlpm); higher upon request
  • Low flow ranges under 4 sccm (smlm), with a minimum controllable mass flow rate of 0.1 sccm (smlm)

Digital Communications

(may vary based on version)

  • Foundation Fieldbus, Modbus RTU, and Profibus DP
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